Thin Film Materials Technology - Sputtering of Compound...

Thin Film Materials Technology - Sputtering of Compound Materials

Wasa, Kiyotaka, Kitabatake, Makoto, Adachi, Hideaki
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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
درجه (قاطیغوری(:
کال:
2004
خپرندویه اداره:
William Andrew Publishing/Noyes
ژبه:
english
صفحه:
531
ISBN 10:
0815519311
ISBN 13:
9780815519317
فایل:
PDF, 7.10 MB
IPFS:
CID , CID Blake2b
english, 2004
کاپی کول (pdf, 7.10 MB)
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